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[Analysis Case] Evaluation of Carrier Density Distribution in Power Devices

Evaluation of the activation rate of the Dopant is possible.

SRA (Spreading Resistance Analysis) is a method that involves polishing a sample at an angle, making contact with two probes on the polished surface, and measuring the spreading resistance (Figure 1). By evaluating the carrier concentration distribution, it is possible to gain insights into the activation status of dopants. As an example, we present a case of SRA conducted on the central and outer regions of a diode chip surface after package opening (Figure 2).

• Company：一般財団法人材料科学技術振興財団　MST
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